• DocumentCode
    1902547
  • Title

    Implementing Thermal Laser and Photoelectric Laser Stimulation in a failure analysis laboratory

  • Author

    Firiti, A. ; Lewis, David ; Beaudoin, F. ; Perdu, P. ; Haller, G. ; Danto, Y.

  • Author_Institution
    STMicroelectron., Rousset, France
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    210
  • Lastpage
    212
  • Abstract
    First Photoelectric Laser Stimulation results (OBIC or LIVA) obtained with an upgraded version of a PHEMOS 1000 from Hamamatsu are presented. This technique is applied in a case study concerning ESD defect localization and is compared to the Thermal Laser Stimulation one.
  • Keywords
    failure analysis; integrated circuit reliability; integrated circuit testing; Hamamatsu; failure analysis; photoelectric laser stimulation; thermal Laser; Failure analysis; Infrared heating; Laboratories; Laser beams; Optical beams; Optical microscopy; Optical sensors; Power lasers; Stimulated emission; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2003. IPFA 2003. Proceedings of the 10th International Symposium on the
  • Print_ISBN
    0-7803-7722-2
  • Type

    conf

  • DOI
    10.1109/IPFA.2003.1222768
  • Filename
    1222768
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1902547