Title :
A Novel Isolation Scheme for Implementation in Very High Density AMG EPROM and FLASH EEPROM Arrays
Author :
Wolstenholme, Graham R ; Bergemont, Albert
Author_Institution :
National Semiconductor, Santa Clara, CA 95052, USA
Abstract :
In this paper a novel isolation scheme for implementation in alternate metal virtual ground (AMG) EPROM and Flash EEPROM arrays is described. It is shown that, unlike the conventional LOCOS isolation, the new isolation scheme allows the AMO concept to be scaled below 0.6¿m geometries. Electrical results are presented for arrays with the new isolation scheme.
Keywords :
Density measurement; EPROM; Geometry; Isolation technology; Length measurement; Microelectronics; Particle measurements; Read only memory; Thickness measurement; Topology;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
