Title :
Practical modeling of the effects of processing fluctuations on circuit behaviour
Author :
Smedes, T. ; Emonts, P.G.A.
Author_Institution :
Philips Semicond., Nijmegen, Netherlands
Abstract :
We describe a tool to predict and analyze the effects of processing fluctuations on circuit behaviour. This tool enables the designer to optimize the performance and robustness of the design. Furthermore, the tool helps to reduce the time to market by helping to fit the design in a given process. Information gained in this way can also help to decide where to put more effort in controlling the process and where the control might perhaps be relaxed. After the description of the tool we present results and application examples
Keywords :
design for manufacture; fluctuations; integrated circuit manufacture; integrated circuit modelling; statistical analysis; circuit behaviour; modeling; processing fluctuations; submicron circuit manufacture; Circuits; Design for manufacture; Design optimization; Fluctuations; Manufacturing processes; Process control; Production; Robustness; Statistical distributions; Time to market;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
DOI :
10.1109/ISSM.1997.664590
