A De-Embedding Technique for On-Wafer Simultaneous Impedance and Power Flow Measurements

An absolute de-embedding technique for simultaneous impedance and power measurements suitable for on-wafer load-pull measurements of microwave transistors is proposed. This technique allows for the performance of a two-port power calibration of a vector network analyzer directly from the embedded reflection coefficient measurements. This method requires two sets of calibration standards, - one coaxial and one coplanar. Each set is comprised of three loads. An absolute power calibration performed at the coaxial reference planes using a reference power meter is also required for power measurement purposes at the coplanar reference planes of the microwave probes.