• DocumentCode
    1906635
  • Title

    Preparaton of graphite-like carbon nitride thin film by CVD

  • Author

    Matsu, T. ; Yudasaka, X. ; Kikuchi, Ryota ; Baxendale, M. ; Ohki, Y. ; Yoshimura, Satoru

  • Author_Institution
    Matsushita Research Institute Tokyo, Inc.
  • fYear
    1994
  • fDate
    24-29 July 1994
  • Firstpage
    579
  • Lastpage
    579
  • Keywords
    Atomic layer deposition; Crystalline materials; Nitrogen; Organic materials; Paramagnetic materials; Spectroscopy; Temperature; Transistors; X-ray diffraction; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
  • Conference_Location
    Seoul, Korea
  • Type

    conf

  • DOI
    10.1109/STSM.1994.835875
  • Filename
    835875
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1906635