Title :
Local work function of transition metal nitrides and carbides measured by Kelvin probe force microscopy
Author :
Miya, K. ; Sasaki, M. ; Yamamoto, S. ; Gotoh, Y. ; Ishikawa, J.
Author_Institution :
Inst. of Appl. Phys., Tsukuba Univ., Japan
Abstract :
In this paper, we investigate transition metal nitrides and carbides, which are promising as a high performance field emission material because of a high melting point, chemical inertness, and high resistance against ion bombardment. Using KPFM, we simultaneously measure the topography and the distribution of the local work function of these polycrystalline films fabricated by ion beam assisted deposition (IBAD) and radio frequency magnetron sputtering (RFMS) techniques.
Keywords :
atomic force microscopy; field emission; sputtered coatings; surface topography; tantalum compounds; work function; IBAD; TaC; TaN; chemical inertness; field emission material; ion beam assisted deposition; kelvin probe force microscopy; melting point; polycrystalline films; radio frequency magnetron sputtering; resistance; topography; transition metal carbides; transition metal nitrides; work function; Chemicals; Electrical resistance measurement; Force measurement; Frequency measurement; Inorganic materials; Kelvin; Magnetic field measurement; Magnetic materials; Microscopy; Probes;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1222948
