Title :
A method to adjust the characteristics of field emission triodes using silicon needles
Author :
Kanechika, M. ; Mitsushima, Y.
Author_Institution :
Toyota Central R&D Labs. Inc., Aichi, Japan
Abstract :
We show a simple method to adjust the characteristics of triodes using silicon needles. Moreover, it is shown that the etching amount could adjust the experimental characteristics of the triodes.
Keywords :
electron field emission; elemental semiconductors; etching; silicon; triodes; Si; anisotropic dry etching; field emission triodes; silicon needles; Anisotropic magnetoresistance; Anodes; Dry etching; Electrodes; Field emitter arrays; Needles; Resists; Silicon; Substrates; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1222960
