Title :
A High Threshold Low Capacitance MOSFET
Author_Institution :
SGS-Thomson Microelectronics - Agrate (Italy)
Abstract :
High threshold low capacitance n-MOS transistors have been obtained by partial implantation of the channel length. These devices also exhibit higher gain and higher breakdown voltage as compared to conventionally implanted transistors. Experimental data show the same behaviour for square large devices as well as narrow and short ones, as predicted by the theory.
Keywords :
CMOS technology; Capacitance; Degradation; Electric variables; Electron emission; MOSFET circuits; Microelectronics; Read only memory; Threshold voltage; Transconductance;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland