Title :
Real time microscopic observation of emission fluctuation on Mo-tip FEA caused by introduced gas
Author :
Minami, K. ; Yamane, K. ; Nakane, H. ; Adachi, H.
Author_Institution :
Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Japan
Abstract :
In this paper, the ion sputtering pump is stopped from operation and only a turbo molecular pump is operated by making a counter measure against the vibration caused by the turbo-molecular pump. The experimental gases that adopted here are nitrogen, hydrogen, methane and ethylene.
Keywords :
field emitter arrays; hydrogen; ion pumps; molybdenum; nitrogen; organic compounds; sputtering; H/sub 2/; Mo; Mo-tip FEA; N; emission fluctuation; ethylene; hydrogen; ion sputtering pump; methane; nitrogen; real time microscopic observation; turbo molecular pump; Aging; Electron emission; Electron tubes; Fluctuations; Gases; Hydrogen; Microscopy; Nitrogen; Vibration measurement; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1222968
