Title :
Lifetime improvement of Si field emitter arrays by HfC coating
Author :
Nagao, M. ; Sato, T. ; Nicolaescu, D. ; Matsukawa, T. ; Kanemaru, S. ; Itoh, J.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Japan
Abstract :
In this paper, we report on our study of the emission life of HFC-coated Si FEAs (HFC FEAs).
Keywords :
elemental semiconductors; field emitter arrays; hafnium compounds; silicon; sputtered coatings; HfC; HfC coated FEA; Si; Si field emitter arrays; emission life; Circuits; Coatings; Degradation; Electron tubes; Field emitter arrays; Flat panel displays; Helium; Hybrid fiber coaxial cables; Life testing; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1222969
