DocumentCode
1907311
Title
On the Temperature Dependence of Polysilicon Emitter Transistors
Author
Doyle, Denis J. ; Lane, William A.
Author_Institution
National Microelectronics Research Centre, University College, Cork, Ireland
fYear
1991
fDate
16-19 Sept. 1991
Firstpage
529
Lastpage
532
Abstract
This paper investigates the Ãf temperature behaviour of polysilicon emitter transistors with a view to understanding the device physics. Realigned polysilicon emitters are shown to behave as ideal single crystal transistors. Transistors with true polysilicon emitters exhibit a reduced temperature sensitivity of Ãf . This is thought to result from a potential barrier at the interface. This potential barrier is dependent on the polysilicon doping level.
Keywords
Doping; Furnaces; Microelectronics; Photonic band gap; Physics; Rapid thermal annealing; Temperature dependence; Temperature measurement; Temperature sensors; Thermionic emission;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location
Montreux, Switzerland
Print_ISBN
0444890661
Type
conf
Filename
5435278
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