Title :
Evaluation of adhesion materials for gold line-and-space surface plasmon antenna on SOI-MOS photodiode
Author :
Satoh, Hiroaki ; Matsuo, Yuki ; Inokawa, Hiroshi ; Ono, Atsushi
Author_Institution :
Res. Inst. of Electron., Shizuoka Univ., Hamamatsu, Japan
Abstract :
In order to improve the light sensitivity of silicon-on-insulator metal-insulator-semiconductor (SOI-MOS) photodiode, differences caused by the adhesion materials for gold (Au) line-and-space (L/S) surface plasmon (SP) antenna are evaluated based on the electromagnetic simulation. Furthermore, the rejection ratio for polarized light with silicon nitride (Si3N4) adhesion layer is analyzed.
Keywords :
MIS devices; photodiodes; silicon-on-insulator; SOI-MOS photodiode; adhesion material; electromagnetic simulation; gold line-and-space surface plasmon antenna; light sensitivity; polarized light; rejection ratio; silicon nitride adhesion layer; silicon-on-insulator metal-insulator-semiconductor photodiode; Absorption; Adhesives; Antennas; Gold; Gratings; Materials; Photodiodes;
Conference_Titel :
Silicon Nanoelectronics Workshop (SNW), 2010
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-7727-2
Electronic_ISBN :
978-1-4244-7726-5
DOI :
10.1109/SNW.2010.5562555
