Abstract :
Papers from local industry, universities, and research labs were presented on various perspectives of risk management and safety, chemical management and waste treatment, yield enhancement and cycle time improvement, CIM system and virtual fab. A special panel discussion on environment, safety and health was held to advocate the significance of ESH to the industry
Keywords :
computer integrated manufacturing; environmental factors; health hazards; integrated circuit economics; integrated circuit yield; risk management; safety; waste disposal; CIM system; ESH; chemical management; cycle time improvement; environment; health; risk management; safety; virtual fab; waste treatment; yield enhancement;
