• DocumentCode
    1907678
  • Title

    Improved electron field emission characteristics of MIM cold cathode by thin amorphous carbon film coating

  • Author

    Kim, Y.C. ; Min-Soo Park ; Nam-Seok Kang ; Kwang-Young Kim

  • Author_Institution
    FED Group, LG Electron. Inc., Seoul, South Korea
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    65
  • Abstract
    Summary form only given. Due to the negative or low electron affinity of carbon materials such as amorphous carbon (a-C) and diamond thin films, they are often considered as one of the excellent candidates for field emission cathodes. Besides low electron affinity, a-C and a-CN thin films have been revealed that they are low work function (⩽2 eV) materials. In this study, we have tested a-C thin films on Metal-Insulator-Metal (MIM) cold cathodes to improve electron emission efficiency (η). a-C thin films are deposited on MIM (Al-Al/sub 2/O/sub 3/-Au) cold cathodes using simple magnetron sputtering of graphite target. The physical properties of a-C films are analyzed through Raman, UV-Visible, and Auger spectrometry. We have also evaluated the electron emission properties by current-voltage (I-V) and light emission analysis. Marked improvement has been achieved by coating thin a-C film on top of the MIM (Al-Al2O3-Au) cold cathode; the values of η obtained from surface modified MIM cathodes by a-C films are strongly dependent on the thickness of a-C as expected from the simple flat band model. These results are interpreted as the effect of surface work function lowering.
  • Keywords
    Auger electron spectra; MIM devices; Raman spectra; alumina; aluminium; amorphous state; carbon; cathodes; electron field emission; gold; sputter deposition; thin films; ultraviolet spectra; work function; Al-Al/sub 2/O/sub 3/-Au; Auger spectra; C; MIM cold cathode; Raman spectra; UV spectra; current-voltage characteristics; electron emission efficiency; electron field emission; light emission; magnetron sputtering; metal-insulator-metal cold cathodes; surface work function; thin amorphous carbon film coating; thin films deposition; visible spectra; Amorphous materials; Carbon dioxide; Cathodes; Diamond-like carbon; Electron emission; Magnetic analysis; Time of arrival estimation; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1222985
  • Filename
    1222985