• DocumentCode
    1907750
  • Title

    Design of a CMOS-compatible field-emission magnetic sensor with adjustable sensitivity

  • Author

    Garner, D.M. ; French, P.J. ; Hui, G. ; Fung, A.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Univ. Coll. London, UK
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    71
  • Lastpage
    72
  • Abstract
    A magnetic sensor based upon the effect of the Lorentz force on vacuum electron motion has been presented. The device has its electrodes in the plane of the silicon substrate, allowing fields perpendicular to the substrate to be detected.
  • Keywords
    electron field emission; magnetic sensors; sensitivity; CMOS compatible field emission magnetic sensor; Lorentz force; Si; electrodes; sensitivity; silicon substrate; vacuum electron motion; Anodes; Cathodes; Electrodes; Electron beams; Etching; Magnetic field measurement; Magnetic sensors; Silicon; Voice mail; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1222988
  • Filename
    1222988
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1907750