Title :
2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303)
Abstract :
Presents the front cover, front matter, and table of contents from the conference proceedings.
Keywords :
DRAM chips; MMIC; VLSI; dielectric thin films; integrated circuit interconnections; integrated circuit manufacture; integrated circuit reliability; integrated memory circuits; lithography; permittivity; silicon-on-insulator; CMOS devices; CMOS reliability; DRAM cell technology; DRAM technology; RF/analog devices; SOI; Si; Si-SiO/sub 2/; VLSI technology; high-k gate dielectrics; interconnects; lithography/process technology; memory technology; nonvolatile memory; process technology; strained Si devices;
Conference_Titel :
VLSI Technology, 2002. Digest of Technical Papers. 2002 Symposium on
Conference_Location :
Honolulu, HI, USA
Print_ISBN :
0-7803-7312-X
DOI :
10.1109/VLSIT.2002.1015363
