DocumentCode

1907821

Title

SiON-Au Double Layer Microactuator Fabrication

Author

Dong, Q. ; Benecke, W. ; Schliwinski, H.

Author_Institution

Fraunhofer-Institut fÿr Microstrukturtechnik, Dillenburger Str. 53, 1000 Berlin 33, Germany

fYear

1991

fDate

16-19 Sept. 1991

Firstpage

415

Lastpage

418

Keywords

Dry etching; Fabrication; Gold; Microactuators; Optical films; Plasma measurements; Resistors; Semiconductor films; Silicon; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Device Research Conference, 1991. ESSDERC '91. 21st European

Conference_Location

Montreux, Switzerland

Print_ISBN

0444890661

Type

conf

Filename

5435299