• DocumentCode
    1907904
  • Title

    Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

  • Author

    Buser, R.A. ; Brugger, Juergen ; de Rooij, N.F.

  • Author_Institution
    Institute of Microtechnology, University of Neuchâtel, Breguet 2, CH-2000 NEUCHATEL, Switzerland
  • fYear
    1991
  • fDate
    16-19 Sept. 1991
  • Firstpage
    407
  • Lastpage
    410
  • Abstract
    A monocrystalline silicon lever with an integrated silicon tip for a Force/Fiction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.
  • Keywords
    Atomic force microscopy; Atomic measurements; Mechanical systems; Microelectronics; Resonance; Resonant frequency; Scanning probe microscopy; Shape; Silicon; Surface topography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
  • Conference_Location
    Montreux, Switzerland
  • Print_ISBN
    0444890661
  • Type

    conf

  • Filename
    5435301
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1907904