Title :
Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements
Author :
Linder, C. ; Grétillat, M. ; de Rooij, N.F.
Author_Institution :
Institute of Microtechnology, University of Neuchâtel, Breguet 2, 2000 Neuchâtel, Switzerland
Abstract :
Two resonators with polysilicon microbeams as oscillating elements are presented. One oscillator is capacitively excitated and detected, the other one is electro-thermally activated and measured by means of piezoresistors. Sacrificial layer technology with different types of sacrificial dioxide (thermal and CVD) is applied for the fabrication of the free-standing polysilicon beams. Gain/phase measurements are performed to examine the frequency response of the resonators.
Keywords :
Capacitors; Fabrication; Mechanical sensors; Piezoresistive devices; Resistors; Resonance; Resonant frequency; Silicon compounds; Substrates; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland
