Title :
Benchmarking Semiconductor Manufacturing
Author :
Leachman, Robert C. ; Hodges, David A.
Author_Institution :
University of California
fDate :
22-24 September 1997
Keywords :
Calendars; Companies; Computer integrated manufacturing; Fabrication; Manufacturing processes; Microelectronics; Productivity; Semiconductor device manufacture; Throughput; Very large scale integration;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194372
