DocumentCode :
1908124
Title :
Prospects in Silicon Nanoelectronics
Author :
Rossum, M. Van
Author_Institution :
IMEC, Belgium
fYear :
1997
fDate :
22-24 September 1997
Firstpage :
28
Lastpage :
33
Keywords :
Germanium silicon alloys; Integrated circuit interconnections; Interference; Lithography; MOSFET circuits; Nanoelectronics; Nanotechnology; Physics; Quantum dots; Silicon germanium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
Type :
conf
DOI :
10.1109/ESSDERC.1997.194376
Filename :
1503306
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1908124
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