DocumentCode
1908124
Title
Prospects in Silicon Nanoelectronics
Author
Rossum, M. Van
Author_Institution
IMEC, Belgium
fYear
1997
fDate
22-24 September 1997
Firstpage
28
Lastpage
33
Keywords
Germanium silicon alloys; Integrated circuit interconnections; Interference; Lithography; MOSFET circuits; Nanoelectronics; Nanotechnology; Physics; Quantum dots; Silicon germanium;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194376
Filename
1503306
Link To Document