• DocumentCode
    1908362
  • Title

    Effect of in situ Cs treatment on the field emission characteristics of amorphous diamond films

  • Author

    Xie, W.G. ; Chen, J. ; Deng, S.Z. ; Xu, N.S.

  • Author_Institution
    State Key Lab. of Optoelectron. Mater. & Technol., Zhongshan Univ., Guangzhou, China
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    113
  • Abstract
    Summary form only given. In this study, we will report the effect of in situ Cs treatment on field emission characteristics of amorphous diamond (a-D) films. The a-D film was prepared using filtered cathodic vacuum arc (FCVA) system on Cu substrate with thickness from 10 nm to 40 nm. In situ Cs deposition on a-D film was achieved by evaporation of a Cs source incorporated into UHV field emission testing system. The FE characteristics including I-E curve, spatial distribution of emission sites will be studied using transparent anode technique before and after the Cs treatment. The change of turn-on field, emission site distribution and work function will be studied. The results will be analyzed using F-N theory. Physical mechanism accounting for the observed results will be discussed.
  • Keywords
    amorphous state; anodes; caesium; diamond; field emission; thin films; work function; 10 to 40 nm; C; Cs; Cs source; Cs treatment; Cu; Cu substrate; UHV field emission testing; amorphous diamond films; evaporation; field emission characteristics; filtered cathodic vacuum arc system; transparent anode technique; ultra high voltage field emission; work function; Amorphous materials; Flat panel displays; Substrates; System testing; Vacuum arcs; Vacuum systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1223009
  • Filename
    1223009