Title :
Observation of low energy electron diffraction image and work function of ZrO/W(100) surface
Author :
Miyamoto, N. ; Adachi, H. ; Nakane, H.
Author_Institution :
Dept. of Electr. & Electron. Eng., Muroran Inst. of Technol., Japan
Abstract :
In this paper, the relation between Zr included LEED (low energy electron diffraction) structure and the work function on a modeled ZrO/W surface was investigated.
Keywords :
low energy electron diffraction; surface structure; tungsten; work function; zirconium compounds; Zr included LEED structure; ZrO-W; ZrO/W(100) surface; low energy electron diffraction image; work function; Cathodes; Diffraction; Heating; Scanning electron microscopy; Surface cleaning; Surface finishing; Surface treatment; Threshold voltage; Tungsten; Zirconium;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223010
