DocumentCode :
1908501
Title :
Individual emission images and energy distribution of an n-type Si field emitter array
Author :
Suzuki, Y. ; Imai, Y. ; Shimawaki, H. ; Mimura, H. ; Yokoo, K. ; Minami, T. ; Yamane, Y. ; Adachi, H.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fYear :
2003
fDate :
7-11 July 2003
Firstpage :
123
Lastpage :
124
Abstract :
In this paper, individual emission patterns of a Si field emitter array have been studied. Energy distribution of electrons emitted from a single-tip Si field emitter have been measured using a parallel-plane electron energy analyzer.
Keywords :
elemental semiconductors; field emitter arrays; silicon; Si; electrons energy distribution; emission images; n-type Si field emitter array; parallel-plane electron energy analyzer; Acceleration; Electron emission; Energy measurement; Field emitter arrays; Lenses; Microscopy; Probability distribution; Tail; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
Type :
conf
DOI :
10.1109/IVMC.2003.1223014
Filename :
1223014
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1908501
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