Title :
Substrate surface effect on the fabrication of nanomagnets using spin-coating technique
Author :
Chen, B.T. ; Ng, V. ; Adeyeye, A.O.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
A simple method of depositing wide array of monolayers of 1 μm micron sized polystyrene latex particles using spin coating is presented. By comparing the results obtained on silicon (100) substrates and thermal oxide covered silicon, it was noticed that the oxide led to a marked increase in the area of monolayer array. Magnetic nanostructures were formed by deposition of a nickel layer followed by subsequent lift-off. Magnetic force microscopy results were discussed
Keywords :
magnetic force microscopy; magnetic thin films; monolayers; nanostructured materials; nickel; spin coating; substrates; Ni; Si; lift-off; magnetic force microscopy; magnetic nanostructure; monolayer array; nanomagnet fabrication; nickel layer; polystyrene latex particles; silicon (100) substrate; spin coating; surface effect; thermal oxide; Coatings; Electrons; Fabrication; Lithography; Material storage; Nanostructures; Nickel; Silicon; Substrates; Throughput;
Conference_Titel :
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-7215-8
DOI :
10.1109/NANO.2001.966396
