DocumentCode
1908963
Title
Formation of graphite nanocones using metal nanoparticles as plasma etching masks
Author
Hyoungjoon Park ; Soonil Lee ; Ken Ha Koh
Author_Institution
Dept. of Phys., Ajou Univ., Suwon, South Korea
fYear
2003
fDate
7-11 July 2003
Firstpage
159
Lastpage
160
Abstract
Arrays of graphite nanocones were fabricated by plasma etching of highly oriented pyrolytic graphite (HOPG). Gold nanoparticles, which were used as etching masks, were deposited by immersing HOPG into colloidal gold solution. The shapes and sizes of fabricated nanopillars depended on the plasma etching parameters such as plasma gas, plasma power, and etching time; the choice of plasma gas was important for graphite-nanostructure fabrication in particular. The emission from the pillars fabricated using the oxygen plasma was turned on at 2.3 V//spl mu/m, and the emission current density as large as 35 mA/cm/sup 2/ was measured.
Keywords
colloids; current density; electron field emission; gold; graphite; masks; metallic thin films; nanoparticles; nanotechnology; plasma materials processing; sputter etching; Au; C; colloidal gold solution; emission current density; etching time; gold nanoparticles; graphite nanocones; graphite-nanostructure; highly oriented pyrolytic graphite; metal nanoparticles; nanopillars; oxygen plasma; plasma etching masks; plasma gas; plasma power; Current density; Density measurement; Etching; Fabrication; Gold; Nanoparticles; Plasma applications; Plasma density; Plasma measurements; Shape;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223032
Filename
1223032
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