DocumentCode :
1908963
Title :
Formation of graphite nanocones using metal nanoparticles as plasma etching masks
Author :
Hyoungjoon Park ; Soonil Lee ; Ken Ha Koh
Author_Institution :
Dept. of Phys., Ajou Univ., Suwon, South Korea
fYear :
2003
fDate :
7-11 July 2003
Firstpage :
159
Lastpage :
160
Abstract :
Arrays of graphite nanocones were fabricated by plasma etching of highly oriented pyrolytic graphite (HOPG). Gold nanoparticles, which were used as etching masks, were deposited by immersing HOPG into colloidal gold solution. The shapes and sizes of fabricated nanopillars depended on the plasma etching parameters such as plasma gas, plasma power, and etching time; the choice of plasma gas was important for graphite-nanostructure fabrication in particular. The emission from the pillars fabricated using the oxygen plasma was turned on at 2.3 V//spl mu/m, and the emission current density as large as 35 mA/cm/sup 2/ was measured.
Keywords :
colloids; current density; electron field emission; gold; graphite; masks; metallic thin films; nanoparticles; nanotechnology; plasma materials processing; sputter etching; Au; C; colloidal gold solution; emission current density; etching time; gold nanoparticles; graphite nanocones; graphite-nanostructure; highly oriented pyrolytic graphite; metal nanoparticles; nanopillars; oxygen plasma; plasma etching masks; plasma gas; plasma power; Current density; Density measurement; Etching; Fabrication; Gold; Nanoparticles; Plasma applications; Plasma density; Plasma measurements; Shape;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
Type :
conf
DOI :
10.1109/IVMC.2003.1223032
Filename :
1223032
Link To Document :
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