• DocumentCode
    1908963
  • Title

    Formation of graphite nanocones using metal nanoparticles as plasma etching masks

  • Author

    Hyoungjoon Park ; Soonil Lee ; Ken Ha Koh

  • Author_Institution
    Dept. of Phys., Ajou Univ., Suwon, South Korea
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    159
  • Lastpage
    160
  • Abstract
    Arrays of graphite nanocones were fabricated by plasma etching of highly oriented pyrolytic graphite (HOPG). Gold nanoparticles, which were used as etching masks, were deposited by immersing HOPG into colloidal gold solution. The shapes and sizes of fabricated nanopillars depended on the plasma etching parameters such as plasma gas, plasma power, and etching time; the choice of plasma gas was important for graphite-nanostructure fabrication in particular. The emission from the pillars fabricated using the oxygen plasma was turned on at 2.3 V//spl mu/m, and the emission current density as large as 35 mA/cm/sup 2/ was measured.
  • Keywords
    colloids; current density; electron field emission; gold; graphite; masks; metallic thin films; nanoparticles; nanotechnology; plasma materials processing; sputter etching; Au; C; colloidal gold solution; emission current density; etching time; gold nanoparticles; graphite nanocones; graphite-nanostructure; highly oriented pyrolytic graphite; metal nanoparticles; nanopillars; oxygen plasma; plasma etching masks; plasma gas; plasma power; Current density; Density measurement; Etching; Fabrication; Gold; Nanoparticles; Plasma applications; Plasma density; Plasma measurements; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1223032
  • Filename
    1223032