New anti-punchthrough design for buried channel PMOSFET

Author

Son, Jeonghwan ; Lee, Seungho ; Huh, Kijae ; Yang, Wouns ; Lee, Youngjong ; Hwang, Jeongmo

Author_Institution

LG Semicon Co., Ltd.

fYear

1997

fDate

22-24 September 1997

Firstpage

232

Lastpage

235

Keywords

Boron; CMOS technology; Counting circuits; Degradation; Digital audio players; Doping; Electrodes; Etching; MOSFET circuits; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 1997. Proceeding of the 27th European

Print_ISBN

2-86332-221-4

Type

DOI

10.1109/ESSDERC.1997.194408

Filename

1503338

Link To Document