DocumentCode
1909075
Title
Detailed Matching Analysis of Sub-50 nm-MOS-Transistors
Author
Horstmann, J.T. ; Hilleringmann, U. ; Goser, K.
Author_Institution
University of Dortmund, Germany
fYear
1997
fDate
22-24 September 1997
Firstpage
240
Lastpage
243
Keywords
Doping; Electric variables measurement; Etching; Fluctuations; Geometry; Lithography; Reproducibility of results; Solid modeling; Threshold voltage; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194410
Filename
1503340
Link To Document