Title :
Nanometer Scale Lithography of Silicon and Titanium using Scanning Probe Microscopy
Author :
Dubois, E. ; Fontaine, P.A.
Author_Institution :
IEMN/ISEN, France
fDate :
22-24 September 1997
Keywords :
Atomic force microscopy; Fabrication; Lithography; Scanning electron microscopy; Scanning probe microscopy; Semiconductor films; Silicon; Titanium; Voltage; Writing;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194413
