Title :
Low stress Pd/Ge-based ohmic contacts for GaAs epitaxial-lift-off
Author :
Pollentier, I. ; Zhu, Y. ; De Meulemeester, B. ; Van Daele, P. ; Demeester, P.
Author_Institution :
University of Gent - IMEC, Laboratory of Electromagnetics and Acoustics, St. Pietersnieuwstraat 41, B-9000 Gent, Belgium
Keywords :
Conductivity; Contact resistance; Doping; Gallium arsenide; Gold; Inorganic materials; Ohmic contacts; Semiconductor process modeling; Stress; Temperature;
Conference_Titel :
Solid State Device Research Conference, 1991. ESSDERC '91. 21st European
Conference_Location :
Montreux, Switzerland
