DocumentCode :
1909331
Title :
Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs
Author :
Sugitani, Suehiro ; Onodera, Kiyomitsu ; Aoyama, Shinji ; Hirano, Makoto ; Yamasaki, Kimiyoshi
Author_Institution :
NTT Systems Electronics Labs., Japan
fYear :
1997
fDate :
22-24 September 1997
Firstpage :
280
Lastpage :
283
Keywords :
Coupling circuits; Fabrication; Inductors; Insulation; Integrated circuit interconnections; MMICs; Metal-insulator structures; Nonhomogeneous media; Polyimides; Sputter etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
Type :
conf
DOI :
10.1109/ESSDERC.1997.194420
Filename :
1503350
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1909331
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