• DocumentCode
    1909331
  • Title

    Novel Fabrication Technology for Ultra-Compact Three-Dimensional MMICs

  • Author

    Sugitani, Suehiro ; Onodera, Kiyomitsu ; Aoyama, Shinji ; Hirano, Makoto ; Yamasaki, Kimiyoshi

  • Author_Institution
    NTT Systems Electronics Labs., Japan
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    280
  • Lastpage
    283
  • Keywords
    Coupling circuits; Fabrication; Inductors; Insulation; Integrated circuit interconnections; MMICs; Metal-insulator structures; Nonhomogeneous media; Polyimides; Sputter etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194420
  • Filename
    1503350
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1909331