Title :
Influence of ambient gases on the HfC-coated Si field emitter arrays
Author :
Sato, T. ; Nagao, M. ; Matsukawa, T. ; Kanemaru, S. ; Itoh, J. ; Yamamoto, S.
Author_Institution :
Inst. of Appl. Phys., Tsukuba Univ., Japan
Abstract :
In this paper, we have measured the emission characteristics of hafnium carbide (HfC) FEAs in argon (Ar) and oxygen (O/sub 2/) gas ambients and compared them to those of Si FEAs.
Keywords :
elemental semiconductors; field emitter arrays; hafnium compounds; silicon; Ar; HfC; HfC coated Si field emitter arrays; HfC-Si; O/sub 2/; Si FEA; field emission properties; gases; hafnium carbide; Aging; Argon; Current measurement; Degradation; Electrodes; Field emitter arrays; Gas industry; Gases; Helium; Hybrid fiber coaxial cables;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223044
