• DocumentCode
    1909406
  • Title

    MOLD type multifunctional FEA/SNOM device

  • Author

    Dziuban, J. ; Gorecka-Drzazga, A. ; Bargiel, S.

  • Author_Institution
    Fac. of Microsys. Electron. & Photonics, Wroclaw Univ. of Technol., Poland
  • fYear
    2003
  • fDate
    7-11 July 2003
  • Firstpage
    187
  • Abstract
    Summary form only given. In this paper, a new concept of field emitting array fabrication method is tested. The most important feature of the concept is a formation of a hole at the bottom of a reverse pyramid, anisotropically etched in (100) oriented silicon substrate.
  • Keywords
    etching; field emitter arrays; near-field scanning optical microscopy; (100) oriented silicon substrate; SNOM device; Si; etching; field emitting array; hole formation; mold type multifunctional FEA; Anisotropic magnetoresistance; Electronic equipment testing; Field emitter arrays; Oxidation; Photonics; Silicon carbide; Temperature control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
  • Conference_Location
    Osaka, Japan
  • Print_ISBN
    4-8181-9515-4
  • Type

    conf

  • DOI
    10.1109/IVMC.2003.1223046
  • Filename
    1223046
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1909406