Title :
MOLD type multifunctional FEA/SNOM device
Author :
Dziuban, J. ; Gorecka-Drzazga, A. ; Bargiel, S.
Author_Institution :
Fac. of Microsys. Electron. & Photonics, Wroclaw Univ. of Technol., Poland
Abstract :
Summary form only given. In this paper, a new concept of field emitting array fabrication method is tested. The most important feature of the concept is a formation of a hole at the bottom of a reverse pyramid, anisotropically etched in (100) oriented silicon substrate.
Keywords :
etching; field emitter arrays; near-field scanning optical microscopy; (100) oriented silicon substrate; SNOM device; Si; etching; field emitting array; hole formation; mold type multifunctional FEA; Anisotropic magnetoresistance; Electronic equipment testing; Field emitter arrays; Oxidation; Photonics; Silicon carbide; Temperature control;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223046
