Handling AFM cantilever chips by a force feedback-based micromanipulation system

Author

Menciassi, A. ; Eisinberg, A. ; Mazzoni, M. ; Scalari, G. ; Dario, P.

Author_Institution

MiTech Lab, Scuola Normale Superiore, Pisa, Italy

fYear

2001

fDate

2001

Firstpage

157

Lastpage

161

Abstract

In Atomic Force Microscopy (AFM) micromachined tips located on silicon cantilevers are used to scan and characterize surfaces in the nanometer range. Cantilever chips have to be cut manually from the wafer by means of a razor blade and then grasped, positioned and glued to the AFM tip holder. This operation, even if performed by trained operators, has a 70% yield rate. This paper describes step by step the same task performed by a force feedback-based micromanipulation system developed in the authors´ laboratory. The 100% yield rate achieved is a very impressive result, considering that unskilled operators have carried out the tests

Keywords

atomic force microscopy; force feedback; micromanipulators; physical instrumentation control; Si; atomic force microscopy; force feedback; micromachined tip; micromanipulation system; razor blade; silicon cantilever chip; Atomic force microscopy; Blades; Force feedback; Force sensors; Grippers; Haptic interfaces; Imaging phantoms; Probes; Silicon; Workstations;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966411

Filename

966411