Title :
Selectively-Implanted Collector Profile Optimisation for High-Speed Vertical Bipolar Transistors
Author :
Peter, M.S. ; Hurkx, G.A.M. ; Timmering, C.E.
Author_Institution :
Philips Research Laboratories, Eindhoven, The Netherlands
fDate :
22-24 September 1997
Keywords :
Bipolar transistors; Capacitance; Design methodology; Electrical resistance measurement; Implants; Laboratories; Medical simulation; Response surface methodology; Silicon carbide; US Department of Energy;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194427
