Development of an electron optical instrument for evaluation of multi emitters - outline of the instrument

Author

Shimoyama, H. ; Murata, H. ; Kimura, T. ; Matsui, T. ; Mogami, A. ; Sakai, Y. ; Kudo, M. ; Kato, M. ; Betsui, K. ; Inoue, Ken

Author_Institution

Meijo Univ., Nagoya, Japan

fYear

2003

fDate

7-11 July 2003

Firstpage

199

Abstract

Summary form only given. In this paper, we have developed electron optical instrument for evaluation of multimeters such as field emitter arrays. The instrument is a kind of an emission microscope, in which a magnified image of a specimen itself. The instrument is equipped with a beam illumination system that irradiated the specimen with electron beam or UV light for obtaining secondary (or reflected) electrons or photo electrons from the specimen, and is capable of operating as an FEEM, a PEEM and an LEEM.

Keywords

electron optics; field emission electron microscopes; field emitter arrays; UV light illumination; electron beam illumination; electron optical instrument; emission microscope; field emitter arrays; multimeters; photoelectron emission; reflected electrons; secondary electron emission; Electron beams; Electron emission; Electron microscopy; Electron optics; Field emitter arrays; Optical arrays; Photoelectron microscopy; Stimulated emission;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Conference_Location

Osaka, Japan

Print_ISBN

4-8181-9515-4

Type

conf

DOI

10.1109/IVMC.2003.1223052

Filename

1223052