Development of an electron optical instrument for evaluation of multi emitters-simultaneous observations of LEEM and FEEM image as well as PEEM and FEEM images

Summary form only given. We have developed an electron optical instrument for evaluation of multi emitters such as field emitter arrays. The instrument is a versatile emission microscope and is cable of operating as an FEEM, an LEEM and a PEEM. The most important feature pf the instrument is the capability of simultaneous observation of LEEM and FEEM images as well as PEEM and FEEM images, thus enabling us to obtain quantitative knowledge as to the percentage of actually working emitters out of the whole emitters, stability of the emission current from each individual working emitter.