Title :
The electrical characteristic dependence of reactive plasma evaporated copper phthalocyamne film on the NO/sub x/ gas absorption.
Author :
Choi, C.G. ; Lee, W.J. ; Lee, S.C.
Author_Institution :
KAIST
Keywords :
Copper; Electric variables; Gas detectors; Metal-insulator structures; Plasma materials processing; Plasma measurements; Plasma properties; Schottky diodes; Semiconductor diodes; Semiconductor films;
Conference_Titel :
Science and Technology of Synthetic Metals, 1994. ICSM '94. International Conference on
Conference_Location :
Seoul, Korea
DOI :
10.1109/STSM.1994.836008