Fabrication of nano channel systems in quartz by laser-induced splitting

Author

Qin, Julia S J ; Li, Wen J.

Author_Institution

Center for Micro & Nano Syst., Chinese Univ. of Hong Kong, Shatin, China

fYear

2001

fDate

2001

Firstpage

233

Lastpage

237

Abstract

This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser has been used to dry fabricate micro channels (25 μm-100 μm diameter) in a 1 cm³ fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, a 1D-controllable self-connecting nano fracture can be formed as a rectangular channel. This nano channel is smooth with extremely high aspect ratio (~10⁴ depth to width ratio). The length is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast, and inexpensive with potential applications in capillary electrophoresis, and electro-osmosis driven nano-filtration

Keywords

laser materials processing; nanotechnology; quartz; 1D self-connecting nanofracture; 25 to 100 micron; Nd:YAG laser processing; SiO₂; capillary electrophoresis; electro-osmosis; fused silica substrate; laser-induced splitting; nano-filtration; nanochannel fabrication; quartz; Electrokinetics; Etching; Micromachining; Optical device fabrication; Optical materials; Optical pulses; Optical sensors; Optical surface waves; Silicon compounds; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on

Conference_Location

Maui, HI

Print_ISBN

0-7803-7215-8

Type

conf

DOI

10.1109/NANO.2001.966425

Filename

966425