• DocumentCode
    1909925
  • Title

    RTS diagnostics of source-drain (edge?) related defects in submicron n-MOSFETs

  • Author

    Lukyanchikova, N. ; Petrichuk, M.V. ; Garbar, N. ; Simoen, E. ; Claeys, C.

  • Author_Institution
    Institute of Semiconductor Physics, Kiev, Ukraine
  • fYear
    1997
  • fDate
    22-24 September 1997
  • Firstpage
    368
  • Lastpage
    371
  • Keywords
    CMOS technology; Condition monitoring; Fluctuations; Low-frequency noise; MOSFET circuits; Noise measurement; Physics; Semiconductor device noise; Semiconductor diodes; Telegraphy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194442
  • Filename
    1503372