DocumentCode
1909925
Title
RTS diagnostics of source-drain (edge?) related defects in submicron n-MOSFETs
Author
Lukyanchikova, N. ; Petrichuk, M.V. ; Garbar, N. ; Simoen, E. ; Claeys, C.
Author_Institution
Institute of Semiconductor Physics, Kiev, Ukraine
fYear
1997
fDate
22-24 September 1997
Firstpage
368
Lastpage
371
Keywords
CMOS technology; Condition monitoring; Fluctuations; Low-frequency noise; MOSFET circuits; Noise measurement; Physics; Semiconductor device noise; Semiconductor diodes; Telegraphy;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN
2-86332-221-4
Type
conf
DOI
10.1109/ESSDERC.1997.194442
Filename
1503372
Link To Document