DocumentCode :
1910000
Title :
PHOMAG: a photolithography machine allocation game
Author :
Chang, Shi-Chung ; Liu, Chung-Yang ; Hu, Ming-Der ; Wu, Hsim-Yi ; Wu, Hsin-Chen ; Chao, Cheng-Lin ; Chen, Ren-Cheng
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear :
1997
fDate :
6-8 Oct 1997
Abstract :
In this paper, a computer simulation-based decision aid system is designed to serve as an interactive what-if analysis for dynamic allocation of photolithography machines in a fab. The system, PHOMAG, is featured by a full scale fab simulation model using ManSimTM, incorporation of interactive user-defined/dispatching decision in the simulator using UserAccessTM and a user friendly GUI on PC/Windows95TM. PHOMAG has been implemented in the field with positive user feedback
Keywords :
decision support systems; digital simulation; dispatching; graphical user interfaces; integrated circuit manufacture; photolithography; ManSim; PHOMAG; computer simulation-based decision aid system; dynamic allocation; full scale fab simulation model; interactive user-defined/dispatching decision; interactive what-if analysis; photolithography machine allocation game; user friendly GUI; Chaos; Computational modeling; Computer simulation; Fabrication; Flow production systems; Foundries; Graphical user interfaces; Lithography; Semiconductor device modeling; Workstations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3752-2
Type :
conf
DOI :
10.1109/ISSM.1997.664607
Filename :
664607
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1910000
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