DocumentCode :
1910028
Title :
Characterization of Nano Channel Alumina for pattern transfer on silicon as part of a nanoimprint process
Author :
Razeeb, K.M. ; Rahman, I.Z. ; Rahman, M.A.
Author_Institution :
Mater. & Surface Sci. Inst., Limerick Univ., Ireland
fYear :
2001
fDate :
2001
Firstpage :
266
Lastpage :
271
Abstract :
The suitability of Nano channel Alumina (NCA) as template for pattern transfer is studied as part of a nanoimprint process. Our investigation revealed that a commercially available NCA (AnodiscTM 13) is brittle in nature with high surface roughness but the roughness may be reduced by sputter coating the NCA with SiO2. We also report on characterization of the surface morphology of spin coated PMMA (Polymethylmethacrylate) film, which plays a vital role in the imprint process
Keywords :
alumina; elemental semiconductors; nanotechnology; polymer films; silicon; silicon compounds; spin coating; sputtered coatings; surface topography; Al2O3; Anodisc 13; Nano Channel Alumina template; PMMA film; Si; SiO2; SiO2 sputter coating; nanoimprint process; pattern transfer; silicon wafer; spin coating; surface morphology; surface roughness; Biomembranes; Glass; Magnetic materials; Polymer films; Resists; Rough surfaces; Silicon; Surface morphology; Surface roughness; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-7215-8
Type :
conf
DOI :
10.1109/NANO.2001.966431
Filename :
966431
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1910028
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