Title :
0.67 μm light propagation characteristics of MSF waveguide at 1 μm rule
Author :
Huang, Fujun ; Morita, Shinzo
Author_Institution :
Dept. of Electron., Nagoya Univ., Japan
Abstract :
MSF (mixed optical devices with micro-sphere arrays and thin film waveguides) waveguide was newly proposed and the light propagation characteristics was reported. Also laser light propagation characteristics of linear and curvilinear polystyrene micro-sphere array were summarized. Evanescent light interaction between the thin film and the micro-sphere array was expected for MSF waveguide at 1 μm rule
Keywords :
light propagation; optical arrays; optical films; optical waveguides; 0.67 micron; 1 micron; MSF waveguide; evanescent light interaction; laser light propagation; mixed optical device; polystyrene micro-sphere array; thin film waveguide; Electron tubes; Fiber lasers; Optical arrays; Optical attenuators; Optical propagation; Optical waveguides; Scanning electron microscopy; Surface structures; Transistors; Waveguide lasers;
Conference_Titel :
Nanotechnology, 2001. IEEE-NANO 2001. Proceedings of the 2001 1st IEEE Conference on
Conference_Location :
Maui, HI
Print_ISBN :
0-7803-7215-8
DOI :
10.1109/NANO.2001.966438
