Title :
Measuring the drain voltage dependent series resistance in submicron LDD MOSFET´s
Author :
Otten, J.A.M. ; Klaassen, F.M.
Author_Institution :
Eindhoven University of Technology, Department of Electrical Engineering, P.O. Box 513, 5600 MB Eindhoven, The Netherlands.
Abstract :
Though already much attention was paid to the gate-voltage dependence of the MOSFET series resistance [1] the behaviour of the drain series resistance as a function of drain bias could not be measured until now. In this paper a general measurement principle to determine the series resistance in a LDD MOSFET as a function of drain bias is developed. Measured results for a 0.7 ¿m device are given.
Keywords :
Electric resistance; Electric variables measurement; Electrical resistance measurement; Equations; MOSFET circuits; Microelectronics; Voltage measurement;
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location :
Leuven, Belgium
