DocumentCode
1910335
Title
Integration of Vertical/Quasivertical DMOS, CMOS and Bipolar Transistors in a 50 V SIMOX Process
Author
Weyers, J. ; Vogt, Hendrik ; Berger, Marcel ; Mach, Werner ; Mutterlein, B. ; Raab, M. ; Richter, Felix ; Vogt, Florian
Author_Institution
Fraunhofer-Institute of Microelectronic Circuits and Systems, FinkenstraÃ\x9fe 61, D-W-4100 Duisburg I, FRG
fYear
1992
fDate
14-17 Sept. 1992
Firstpage
733
Lastpage
735
Keywords
Bipolar transistors; Bismuth; CMOS process; Design engineering; Electronic switching systems; Etching; Isolation technology; Large scale integration; Microelectronics; Tiles;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1992. ESSDERC '92. 22nd European
Conference_Location
Leuven, Belgium
Print_ISBN
0444894780
Type
conf
Filename
5435396
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