Title :
Vibration sensor with optoelectronic interface
Author :
Peiner, E. ; Fricke, K. ; Mo, S. ; Fehly, D. ; Schlachetzki, A.
Author_Institution :
Technische Universit¨at Braunschweig, Germany
fDate :
22-24 September 1997
Keywords :
Circuits; Electromagnetic interference; Gallium arsenide; Machinery; Optical device fabrication; Optoelectronic and photonic sensors; Sensor phenomena and characterization; Temperature sensors; Transducers; Vibration control;
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
DOI :
10.1109/ESSDERC.1997.194460
