DocumentCode
1910381
Title
Fabrication of gated field emission arrays with aligned carbon nanotubes
Author
Ding, M.Q. ; Xinghui Li ; Guodong Bai ; Fuquan Zhang ; Fujiang Liao
Author_Institution
Beijing Vacuum Electron. Res. Inst., China
fYear
2003
fDate
7-11 July 2003
Firstpage
257
Lastpage
258
Abstract
We have fabricated Spindt-type gated field emission arrays with vertically aligned CNTs emitters. A detailed fabrication process together with the growth and characterization of the aligned carbon nanotubes will be presented and discussed.
Keywords
carbon nanotubes; field emitter arrays; plasma deposition; scanning electron microscopy; transmission electron microscopy; C; SEM; TEM; aligned carbon nanotubes; carbon nanotubes properties; spindt type gated field emission arrays fabrication; Carbon nanotubes; Diodes; Fabrication; Field emitter arrays; Flat panel displays; Plasma applications; Robustness; Scanning electron microscopy; Shape; Transmission electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location
Osaka, Japan
Print_ISBN
4-8181-9515-4
Type
conf
DOI
10.1109/IVMC.2003.1223081
Filename
1223081
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