Characterization of parylene coated combined scanning probe tips for in-situ electrochemical and topographical imaging

The combination of scanning electrochemical microscopy (SECM) With atomic force microscopy (AFM) requires a combined scanning probe tip. In order to add the functionality of SECM, submicro- and nanoelectrodes have been integrated into AFM tips, using focused ion beam (FIB) based microfabrication techniques. Meeting the requirements for SECM measurements, needs to integrate the electroactive area within a certain working distance recessed form the apex of the AFM tip. Furthermore, a pinhole-free insulating layer is a major prerequisite for simultaneous topographical and electrochemical imaging applications. Parylene C was successfully applied for the insulation of the combined scanning probe tips. Cyclovoltarnmetry was performed, in order to characterize the electrochemical properties. Furthermore, FIB microfabrication procedures benefit from the advantageous properties of Parylene towards manufacturing integrated nanoelectrodes