Title :
Field emission characteristics of defect-controlled polyimide tunneling cathode
Author :
Baba, A. ; Yoshida, T. ; Asano, T.
Author_Institution :
Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
In this paper, we investigate the feasibility of an ion-beam irradiated polyimide film for application to MIM cold cathode´s insulating material. We call this cold cathode defect-controlled tunneling cathode.
Keywords :
MIM devices; cathodes; electron field emission; insulating materials; polymer films; tunnelling; MIM cold cathode´s insulating material; defect-controlled polyimide tunneling cathode; field emission; ion-beam irradiated polyimide film; Cathodes; Conducting materials; Electron emission; Fabrication; Insulation; Polyimides; Silicides; Threshold voltage; Tungsten; Tunneling;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223086
