Title :
Fabrication of thin-film cold cathode for flat panel display
Author :
Noda, D. ; Hagiwara, K. ; Yamamoto, T. ; Okamoto, S.
Author_Institution :
Japan Soc. for the Promotion of Sci., Tokyo, Japan
Abstract :
We have employed the thin-film cold cathode for the application to field emission display. The thin-film cold cathode uses hot electrons produced in ZnS accelerating layer by a high electric field. The hot electrons are emitting through thin Au electrodes. This device is very simple structure and electron emission is good uniformity. We consider that the thin-film cold cathode is one of the most promising technologies for the next generation flat panel displays.
Keywords :
II-VI semiconductors; cold-cathode tubes; electron emission; field emission displays; gold; hot carriers; tantalum compounds; thin film devices; zinc compounds; Au; Au electrodes; Ta/sub 2/O/sub 5/; ZnS; ZnS accelerating layer; electron emission; flat panel display; hot electrons; thin-film cold cathode; Acceleration; Cathodes; Electrodes; Electron emission; Fabrication; Flat panel displays; Gold; Transistors; Voltage; Zinc compounds;
Conference_Titel :
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Conference_Location :
Osaka, Japan
Print_ISBN :
4-8181-9515-4
DOI :
10.1109/IVMC.2003.1223088
